The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor
The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor
复制标题
DOI：
10.1088/0960-1317/18/2/025021
复制
发表时间：
2008-02-01
影响因子：
2.3
通讯作者：
Hedley, J.
中科院分区：
文献类型：
--
作者：
Ismail, A. K.;Burdess, J. S.;Hedley, J.
本文提出了一种退化模式谐振质量传感器的制造，表征和测试的晶体硅MEMS圆形膜片的形式进行了讨论。该器件由SOI晶片的器件层制成，SOI晶片阳极键合到Pyrex衬底。评估制造过程的功效。通过静电驱动隔膜并使用光学表面轮廓测量法和激光多普勒振动测量法测量其响应来进行隔膜的表征。简并振动模式的温度稳定性进行了研究，结果表明，这些模式的谐振频率的初始频率分裂不随温度的变化显着。加工后呈现对称表面轮廓的结构显示出显著的温度稳定性。作为质量传感器的设备的性能已经通过功能化隔膜的特定部分以提供S100 β β蛋白的结合位点来评估。检测到添加质量降至9皮克水平。
This paper presents a discussion on the fabrication, characterization and testing of a degenerate mode resonant mass sensor which takes the form of a crystalline silicon MEMS circular diaphragm. The device is fabricated from the device layer of a SOI wafer which is bonded anodically to a Pyrex substrate. The efficacy of the fabrication process is assessed. Characterization of the diaphragm is performed by actuating the diaphragm electrostatically and measuring its response using optical surface profilometry and laser Doppler vibrometry. The temperature stability of the degenerate modes of vibration is investigated and it is shown that the initial frequency split in the resonant frequencies of these modes does not change significantly with temperature. Structures which present a symmetric surface profile after processing show remarkable temperature stability. The performance of the device as a mass sensor has been evaluated by functionalizing specific sectors of the diaphragm to provide bonding sites for a S100 beta beta protein. Added masses down to a level of 9 pg were detected.