Effect of substrate charging on the reliability of capacitive RF MEMS switches
Effect of substrate charging on the reliability of capacitive RF MEMS switches
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DOI：
10.1016/j.sna.2008.07.003
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发表时间：
2009-09-24
影响因子：
4.6
通讯作者：
De Wolf, I.
中科院分区：
文献类型：
--
作者：
Czarnecki, P.;Rottenberg, X.;De Wolf, I.
在本文中，我们表明基板充电是限制电容式 RF MEMS 开关寿命的另一种可能的故障机制。在不同基板上制造的开关可以表现出不同的寿命。此外，环境条件对寿命的影响可能取决于基材的类型。此外，我们还表明，由于基板充电，以低于吸合电压的驱动电压驱动的开关可以在一段时间后吸合。我们展示了专门通过最小化中介层电介质的充电来强调基板充电的实验结果。 (C) 2008 Elsevier B.V. 保留所有权利。
In this paper, we show that Substrate charging is another possible failure mechanism limiting the lifetime of capacitive RF MEMS switches. Switches fabricated on different substrates can exhibit a different lifetime. Also the influence of environmental conditions on the lifetime can depend on the type of substrate. In addition, we show that switches actuated with an actuation voltage below pull-in voltage can pull-in after some time due to charging of the substrate. We show results of experiments dedicated to emphasize this substrate charging by minimizing charging of the interposer dielectric. (C) 2008 Elsevier B.V. All rights reserved.