Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
复制标题
使用 GSM-MoM 分析设计具有导电挡板和石英玻璃条的 1 m2 级等离子体激发单层槽缝波导阵列
DOI：
10.1093/ietcom/e89-b.5.1627
复制
发表时间：
2006
影响因子：
0.7
通讯作者：
Y. Nakata
中科院分区：
文献类型：
--
作者：
T. Hirano;K. Sakurai;J. Hirokawa;M. Ando;T. Ide;A. Sasaki;K. Azuma;Y. Nakata
提出了一种用于微波等离子体激发的1m2单层缝隙波导阵列，该阵列由导电挡板和位于缝隙孔前的石英玻璃条组成，称为真空窗。复杂的外真空窗口的影响阻碍了均匀分布的实现。采用广义散射矩阵法(GSM)-矩量法(MoM)杂交分析方法，对具有真空窗口的交变相位馈电单层缝隙波导阵列单元进行了分析，忽略了等离子体和腔体的影响，实现了均匀孔径电磁场分布。GSM-MOM分析给出了可靠的数值结果，而MOM对于长腔由于格林函数的奇异性而存在数值误差。用1/5比例模型天线进行近场测量，观测到了真空窗外均匀孔径电磁场的分布，验证了分析和设计的有效性。
The authors have proposed a 1 m 2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.