Line-edge roughness as a challenge for high-performance wire grid polarizers in the far ultraviolet and beyond
Line-edge roughness as a challenge for high-performance wire grid polarizers in the far ultraviolet and beyond
复制标题
DOI：
10.1364/oe.26.019534
复制
发表时间：
2018-07-23
期刊：
影响因子：
3.8
通讯作者：
Kroker, Stefanie
中科院分区：
文献类型：
--
作者：
Siefke, Thomas;Heusinger, Martin;Kroker, Stefanie
用于紫外光谱范围内的应用波长的高性能纳米光学元件通常需要仅几十纳米的特征尺寸，其中线边缘粗糙度（LER）成为光学性能的关键参数。在这篇文章中，我们探讨了LER在线栅偏振器（WGP）的光学性能在远紫外范围内的影响。因此，我们提出了一种方法，它使用时域有限差分方法结合一个全面的空间频率相关LER模型。测量的LER为3.6 nm（标准偏差），在248 nm波长处将WGP的消光比降低了3.6倍。我们确定了一个临界范围的相关长度，这最大限度地提高了LER的不利影响。所提出的方法和结果提供了未来的WGP和其他光学元表面在紫外光谱区或更短的波长的制造技术优化的基础。(C)根据OSA开放获取出版协议的条款，2018年美国光学学会
High-performance nano-optical elements for application wavelengths in the ultraviolet spectral range often require feature sizes of only a few tens of nanometers where line edge roughness (LER) becomes a critical parameter for the optical performance. In this contribution, we explore the influence of LER on the optical performance of wire grid polarizers (WGP) in the far ultraviolet range. Therefore, we present a method, which uses the finite difference time domain method in combination with a comprehensive spatial frequency dependent LER model. The measured LER of 3.6 nm (standard deviation) reduces the WGP's extinction ratio by a factor of 3.6 at a wavelength of 248 nm. We identify a critical range of the correlation length, which maximizes the detrimental effect of LER. The presented method and the results provide the basis for future fabrication technology optimization of WGPs and other optical meta-surfaces in the ultraviolet spectral region or at even shorter wavelengths. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement