Investigation on Wire Electrochemical Micro Machining of Ni-based Metallic Glass
Investigation on Wire Electrochemical Micro Machining of Ni-based Metallic Glass
复制标题
镍基金属玻璃线材电化学微加工研究
DOI：
10.1016/j.electacta.2017.03.045
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发表时间：
2017-04-10
影响因子：
6.6
通讯作者：
Zhu, Di
中科院分区：
文献类型：
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作者：
Meng, Lingchao;Zeng, Yongbin;Zhu, Di
金属玻璃（MG）具有优异的功能和结构特性，被认为是实现微机电系统（MEMS）中高性能微器件的理想材料。然而，由于在微尺度上成形的困难，MG的应用目前受到限制。微细电火花线切割加工是一种灵活有效的加工方法，相对于热机械加工具有许多优点，非常适合于金属微成形加工。我们考虑Ni基MG，Ni72Cr19Si7B2的例子，其在0.1M H2SO4溶液中具有典型的钝化特性。当与纳秒脉冲WECMM技术相结合时，过钝化过程可以用于局部材料去除。本文首先探讨了镍基微合金化WECMM的适用电解液。通过改变脉冲电压波形和电解液成分，提高了加工效率和稳定性.采用不同的优化参数加工了微弯曲悬臂梁、微齿轮、微方形螺旋线等复杂微结构。(C)2017爱思唯尔有限公司版权所有
Metallic glasses (MGs) have been recognized as promising materials for realizing high-performance micro devices in micro electromechanical systems (MEMS) due to their excellent functional and structural characteristics. However, the applications of MGs are currently limited because of the difficulty of shaping them on the microscale. Wire electrochemical micro machining (WECMM) is increasingly recognized as a flexible and effective method to fabricate complex-shaped micro metal components with many advantages relative to the thermomechanical processing, which appears to be well suitable for micro shaping of MGs. We consider the example of a Ni-based MG, Ni72Cr19Si7B2, which has a typical passivation characteristic in 0.1 M H2SO4 solution. The transpassive process can be used for localized material removal when combined with nanosecond pulsed WECMM technique. In present work, the applicable electrolyte for WECMM of the Ni-based MG was discussed firstly. Then the voltage pulse waveform and electrolyte composition were modified to improve machining efficiency and stability. Several complex microstructures such as micro curved cantilever beam, micro gear, and micro square helix were machined with different optimized parameters. (C) 2017 Elsevier Ltd. All rights reserved.