Schottky barrier at a Mo-GaAs contact

Schottky barrier at a Mo-GaAs contact
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Mo-GaAs 接触处的肖特基势垒

DOI:
10.1080/00207218008901133
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发表时间:
1980
影响因子:
1.3
通讯作者:
S. Simeonov
S. Simeonov
中科院分区:
工程技术4区
文献类型:
--
作者:
P. M. Batev;M. D. Ivanovitch;E. Kafedjiiska;S. Simeonov

文献摘要

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通过 MoCl6 与 H2 反应,在 GaAs 上沉积钼层。在沉积过程中,GaAs 基板被加热至 400°C。所制备的 Mo-(n)GaAs 结构的正向电流在 5 个十年内按照关系式 J=J0 exp (qU/кT) 增加。肖特基势垒高度为0.90±0.02 eV。反向电流大约与Mo-GaAs界面处的空间电荷层的宽度成正比。这些肖特基势垒结构在 100°C、200°C 和 300°C 下进行热处理后,其 I-V 和 CV 特性未改变。
Molybdenum layers are deposited on GaAs by MoCl6 reaction with H2. During the deposition the GaAs substrates are heated to 400°C. The forward current of prepared Mo-(n)GaAs structure increases over five decades in accordance with the relation J=J0 exp (qU/кT). The Schottky barrier height is 0.90± 0.02 eV. The reverse current is approximately proportional to the width of the space charge layer at the Mo-GaAs interface. After heat treatments at 100, 200 and 300°C of these Schottky barrier structures their I- V and C- V characteristics are unaltered.