Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm.
Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm.
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DOI：
10.1063/1.3509384
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发表时间：
2010-12
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影响因子：
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通讯作者：
T. Kimura;H. Mimura;Soichiro Handa;H. Yumoto;H. Yokoyama;S. Imai;S. Matsuyama;Y. Sano;K. Tamasaku;Y. Komura;Y. Nishino;M. Yabashi;T. Ishikawa;K. Yamauchi
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文献类型：
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作者：
T. Kimura;H. Mimura;Soichiro Handa;H. Yumoto;H. Yokoyama;S. Imai;S. Matsuyama;Y. Sano;K. Tamasaku;Y. Komura;Y. Nishino;M. Yabashi;T. Ishikawa;K. Yamauchi
原位波前补偿是一种很有前途的方法，可以实现 X 射线束焦点尺寸仅为几纳米。然而，精确补偿需要以比波长短得多的精度评估波前。在这里，我们使用多层镜表征了 20 keV 下宽度为 7 nm 的一维聚焦光束。我们证明，可以根据束腰周围测量的多个强度分布来精确确定波前。我们比较了在相同反射镜条件下、三种不同孔径尺寸下测量的强度分布恢复的相位分布，发现相位恢复的精度小至λ∕12。
In situ wavefront compensation is a promising method to realize a focus size of only a few nanometers for x-ray beams. However, precise compensation requires evaluation of the wavefront with an accuracy much shorter than the wavelength. Here, we characterized a one-dimensionally focused beam with a width of 7 nm at 20 keV using a multilayer mirror. We demonstrate that the wavefront can be determined precisely from multiple intensity profiles measured around the beamwaist. We compare the phase profiles recovered from intensity profiles measured under the same mirror condition but with three different aperture sizes and find that the accuracy of phase retrieval is as small as λ∕12.