Aberration Measurement by Confocal Interferometry
Aberration Measurement by Confocal Interferometry
复制标题
通过共焦干涉测量法进行像差测量
DOI：
10.1080/09500348914550281
复制
发表时间：
1989
影响因子：
1.3
通讯作者：
C. Sheppard
中科院分区：
文献类型：
--
作者：
H. J. Matthews;D. K. Hamilton;C. Sheppard
摘要利用共焦干涉显微镜系统中的离焦信号测量了显微物镜的像差和切趾。相位畸变可以测量到约λ/100，并且给出了关于光学系统中的透镜的原位成像性能的定量信息。
Abstract The aberrations and apodization of microscope objectives have been measured by observation of the defocus signal in a confocal interference microscope system. Phase distortions can be measured to approximately λ/100, and quantitative information is given about the imaging performance of the lenses in situ in the optical system.