Ethanol gas sensing performance of high-dimensional fuzz metal oxide nanostructure
Ethanol gas sensing performance of high-dimensional fuzz metal oxide nanostructure
复制标题
DOI：
10.7567/jjap.57.040316
复制
发表时间：
2018-03
影响因子：
1.5
通讯作者：
K. Ibano;Y. Kimura;T. Sugahara;Heun Tae Lee;Y. Ueda
中科院分区：
文献类型：
--
作者：
K. Ibano;Y. Kimura;T. Sugahara;Heun Tae Lee;Y. Ueda
首次研究了He等离子体诱导的纤维状纳米结构的气敏能力。在石英表面沉积一层薄薄的Mo层，用He等离子体辐照形成微晶结构，并在石英炉中退火氧化。然后，通过沉积在该层上的Au电极测量了氧化Mo层的电导率。研究了C2H5OH气体流量对电导率的影响，并将其作为温度从200℃到400℃的函数。观察到在形成绒毛状纳米结构后，样品的灵敏度有所提高。然而，本研究开发的传感器灵敏度低于先前报道的MoO3纳米棒传感器，需要进一步优化氧化以提高灵敏度。
Gas sensing ability of the He plasma induced fiber-like nanostructure, so-called fuzz structure, was firstly examined. A thin Mo layer deposited on a quartz surface was irradiated by He plasma to form the fuzz structure and oxidized by annealing in a quartz furnace. Electric conductivity of the fuzz Mo oxide layer was then measured through the Au electrodes deposited on the layer. Changes in electric conductivity by C2H5OH gas flow were examined as a function of temperature from 200 to 400 °C. Improved sensitivities were observed for the specimens after a fuzz nanostructure formation. However, the sensor developed in this study showed lower sensitivities than previously reported MoO3 nano-rod sensor, further optimization of oxidation is needed to improve the sensitivity.