A 32*32 Parylene-Pyrolyzed Carbon Bolometer Imager
A 32*32 Parylene-Pyrolyzed Carbon Bolometer Imager
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32*32聚对二甲苯热解碳测辐射热计成像仪
DOI：
10.1109/memsys.2006.1627747
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
Y. Tai
中科院分区：
文献类型：
--
作者：
M. Liger;Y. Tai
在这里，我们提出了一种新的和简单的方法来制造非制冷红外探测器适合集成到大面积阵列。该设计是基于通过聚对二甲苯热解获得的薄膜碳。我们展示了第一个微加工碳非冷却测辐射热计阵列由两层具有不同工艺调谐特性的自支撑热解聚对二甲苯碳制成。测量结果表明，目标温度分辨率，或NETD（噪声等效温差）目标温度可以低至35 mK为100 µ s的电信号积分时间，分别。考虑到这是第一次使用热解碳来制造微测辐射热计阵列的事实，这与非常有希望的现有技术状态相匹配。
Here we present a novel and simple way to fabricate uncooled infrared detectors suitable for integration into large-area arrays. The design is based on thin-film carbon obtained by means of parylene pyrolysis. We demonstrate the first micromachined carbon uncooled bolometer array made of two layers of self-supporting pyrolyzed-parylene carbon having different process-tuned properties. Measurements show that the target temperature resolution, or NETD (Noise-Equivalent Temperature Difference) to target temperature can be as low as 35mK for 100 µ s electrical signal integration time, respectively. This matches the current state of the art which is very promising considering the fact that this is the first time pyrolytic carbon has been used to fabricate a microbolometer array.