KINETICS, DYNAMICS AND MUTUAL INTERACTIONS OF DEFECTS ON Si(001)

KINETICS, DYNAMICS AND MUTUAL INTERACTIONS OF DEFECTS ON Si(001)
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Si(001)缺陷的动力学、动力学和相互作用

DOI:
10.1142/s0218625x96002461
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发表时间:
1996
期刊:
影响因子:
--
通讯作者:
M. Lagally
M. Lagally
中科院分区:
--
文献类型:
--
作者:
Zhenyu Zhang;Fang Wu;M. Lagally

文献摘要

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本文对近年来对Si(001)缺陷物理性质的研究进展进行了综述。主要考虑两类缺陷:点缺陷,包括单原子、单二聚体、原子空位和二聚体空位;线缺陷包括台阶、二聚体弦、反相边界和空位线。重点将放在缺陷的动力学和动力学性质上。并讨论了它们之间的相互作用。广泛的理论和实验研究相结合,已经为一些关于缺陷能量学和动力学的基本问题提供了明确的答案,并在其他一些情况下产生了似是而非的解决方案。在调查一些公开或有争议的问题时,也将讨论可能的未来方向。
This article gives a critical review of the recent progress in the understanding of the physical properties of defects on Si(001). Mainly two classes of defects will be considered: point defects, including adatoms, ad-dimers, atom vacancies and dimer vacancies; and line defects, including steps, dimer strings, antiphase boundaries and vacancy lines. The focus will be on the kinetic and dynamic properties of the defects. Also discussed are their mutual interactions. A combination of extensive theoretical and experimental studies has provided clear answers to several fundamental questions about defect energetics and dynamics, and in some other cases has resulted in plausible solutions. In surveying some open or controversial issues, likely future directions will be discussed as well.