Mechanical properties of thin films synthesized by controlled substrate vibration
Mechanical properties of thin films synthesized by controlled substrate vibration
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受控基底振动合成薄膜的机械性能
DOI:
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发表时间:
2005
期刊:
影响因子:
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通讯作者:
T.Suzuki
中科院分区:
文献类型:
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作者:
T.Suzuki