Application of micro-ball bearing on Si for high rolling life-cycle
Application of micro-ball bearing on Si for high rolling life-cycle
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DOI：
10.1016/j.triboint.2009.05.015
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发表时间：
2010-01-01
影响因子：
6.2
通讯作者：
Tang, Xiaosong
中科院分区：
文献类型：
--
作者：
Sinha, Sujeet K.;Pang, Robin;Tang, Xiaosong
本文介绍了一种新型的微型球轴承，它应用于两个相对运动的硅表面之间，在硅表面上形成宽通道，使所有的球轴承都在该通道内滚动，而不是在单个凹槽内滚动。这种类型的微型轴承可以作为摩擦减少器应用于微型和纳米机器。摩擦计装置由连接到传统轴承的顶板（硅晶片）组成，该顶板放置在底板（也是硅晶片）上，该底板通过直流电机以300和500 RPM旋转。将直径为53 +/-3.7 μ m的硼硅酸盐玻璃微球在235 μ N的自重和高湿度条件（75%相对湿度（RH））下在两个圆形硅板（直径15 mm）之间旋转。对宽通道接骨板进行的测试持续超过100万次旋转循环，而没有发生关节面失效。影响生命周期的主要因素被确定为宽通道的存在、球分散和Si板的对齐，（C）2009 Elsevier Ltd.保留所有权利。
In this paper, we introduce a new class of micro-ball bearing that call be applied between two Si surfaces in relative motion where wear is a problem, Wide channel was created on one Si plate for all the ball bearings to roll within this channel rather than in individual grooves. This type of microbearings can be applied as friction reducers to micro- and nano-machines. The tribometer set-up consisted of a top plate (Si wafer), which was connected to a conventional bearing, resting on a bottom plate (also Si wafer) that was rotated at 300 and 500 RPM by a DC motor. Borosilicate glass microspheres, 53 +/- 3.7 mu m in diameter, were rotated between the two circular silicon plates (15 mm diameter) under a dead weight of 235 mu N and in high-humidity conditions (75% relative humidity (RH)). Tests on the plate with wide channel consistently exceeded 1 million cycles of rotation without failure of the bearing. The main factors affecting the life-cycle are identified as the presence of a wide channel, ball dispersion, and alignment of the Si plates, (C) 2009 Elsevier Ltd. All rights reserved.