Quartz Crystal Microbalances for quantitative picosecond laser-material-interaction investigations - Part I: Technical considerations

Quartz Crystal Microbalances for quantitative picosecond laser-material-interaction investigations - Part I: Technical considerations
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DOI:
10.1016/j.sab.2016.10.017
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发表时间:
2016-12
期刊:
Spectrochimica Acta Part B: Atomic Spectroscopy
影响因子:
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通讯作者:
N. Gierse;T. Schildt;H. Esser;G. Sergienko;S. Brezinsek;M. Freisinger;Dongye Zhao;H. Ding;A. Terra;U. Samm;C. Linsmeier
N. Gierse;T. Schildt;H. Esser;G. Sergienko;S. Brezinsek;M. Freisinger;Dongye Zhao;H. Ding;A. Terra;U. Samm;C. Linsmeier
中科院分区:
其他
文献类型:
--
作者:
N. Gierse;T. Schildt;H. Esser;G. Sergienko;S. Brezinsek;M. Freisinger;Dongye Zhao;H. Ding;A. Terra;U. Samm;C. Linsmeier

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在这项工作中的技术适用性石英晶体微量天平(QMBs)为原位,脉冲分辨质量去除测量表明皮秒激光烧蚀磁控溅射涂层。QMB显示出对不同金属的层厚度的灵敏度的线性特性,直到几微米。进行了从金属层烧蚀的质量的激光脉冲分辨测量。在第一激光脉冲期间烧蚀约400 ng的铬,而在随后的脉冲中去除< 220 ng。这与以前的研究结果进行了比较。烧蚀的QMBs的灵敏度被发现是大于沉积,这是由QMBs的径向灵敏度解释。未来的改进的设置和脉冲分辨质量损失测量的激光为基础的方法,如LIBS和LIAS的好处进行了讨论,并将在第二部分目前正在准备。
In this work the technical suitability of Quartz Crystal Microbalances (QMBs) forin situ, pulse resolved mass removal measurements is demonstrated for picosecond laser ablation of magnetron sputtered coatings. The QMBs show a linear characteristic of the sensitivity for layer thickness of different metals up to several microns. Laser pulse resolved measurements of the mass ablated from the metal layer were performed. About 400 ng of chromium was ablated during the first laser pulse while in subsequent pulses < 220 ng were removed. This is compared with previous findings. The sensitivity for ablation of the QMBs is found to be larger than for deposition, which is explained by the radial sensitivity of the QMBs. Future refinements of the setup and the benefits of the pulse resolved mass loss measurements for laser based methods like LIBS and LIAS are discussed and will be presented in part II currently in preparation.