High proton ratio plasma production in a small negative ion source
High proton ratio plasma production in a small negative ion source
复制标题
在小型负离子源中产生高质子比等离子体
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
T. Imai
中科院分区:
文献类型:
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作者:
T. Morishita;T. Inoue;T. Iga;Kazuhiro Watanabe;T. Imai
A proton ratio was measured in the small (1.4 l) arc discharge multicusp source at a pressure of 1.4 Pa. A measured proton ratio in an extracted positive ion beam was 50%. By applying the transverse magnetic field as the magnetic filter in the source, the proton ratio drastically increased to 90% even in such a small source. To clarify the proton production processes, coupled rate equations were numerically solved to estimate particle (H+, H2+, H3+, and H0) densities in the various size of ion source. It has been clarified that a main proton production process is different with the source size. In the large size source, which has better confinement of the source plasma, the ionization of H atom becomes effective to increase the proton yield. In the small ion source, the dissociation of H2+ (H2++e→H++H+e) is the dominant process for the proton production. By adopting the magnetic filter in the small source, H2+ production by primary electron impact is suppressed in the extraction region. Molecular ions are...