Comparison of Atomic Force Microscopy and Nanoscale Optical Microscopy for Measuring Step Heights
Comparison of Atomic Force Microscopy and Nanoscale Optical Microscopy for Measuring Step Heights
复制标题
原子力显微镜和纳米光学显微镜测量台阶高度的比较
DOI：
10.1143/jjap.32.1478
复制
发表时间：
1993
影响因子：
1.5
通讯作者：
Satoru Miyashita Satoru Miyashita
中科院分区：
文献类型：
--
作者：
Hiroshi Komatsu Hiroshi Komatsu;Satoru Miyashita Satoru Miyashita
测量的台阶高度通过纳米光学显微镜和原子力显微镜(AFM)进行了比较，并以Frank螺旋为标准参照物。用双光束干涉法测得螺旋的台阶高度约为16.5 nm，而原子力显微镜测得的螺旋台阶高度为23.45-18.98 nm。对这一差异进行了简要讨论。
Comparison of measured step heights was carried out by means of nanoscale optical microscopes and an atomic force microscope (AFM) using a Frank spiral as a standard reference. It was found that the individual step height of the spiral was about 16.5 nm as obtained using two-beam interferometry, but AFM showed the height as 23.45-18.98 nm. This discrepancy was discussed briefly.