Cost-effective Atomic Layer Deposition Synthesis of Pt Nanotube Arrays: Application for High Performance Supercapacitor
Cost-effective Atomic Layer Deposition Synthesis of Pt Nanotube Arrays: Application for High Performance Supercapacitor
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DOI：
10.1002/smll.201400436
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发表时间：
2014-08-13
期刊：
影响因子：
13.3
通讯作者：
Lei, Yong
中科院分区：
文献类型：
--
作者：
Wen, Liaoyong;Mi, Yan;Lei, Yong
由于Pt的独特优点，使其在燃料电池和微电子领域发挥着重要作用。考虑到铂是一种昂贵的金属，如何实现铂的高效利用是当今的一个主要挑战。本文介绍了一种具有低 N-2 填充步骤的经济有效的原子层沉积 (ALD) 工艺，用于在阳极氧化铝纳米多孔模板中实现清晰的 Pt 纳米管阵列。与传统的 Pt ALD 生长相比，需要更少的 ALD 循环和更短的前驱体脉冲时间，这源于低 N-2 填充步骤。为了实现类似的 Pt 纳米管，使用我们的 ALD 工艺需要大约半个周期和 10% Pt 前驱体脉冲时间。同时，人们还探索了Pt纳米管阵列作为基于核/壳Pt/MnO2纳米管的超级电容器的集流体。这种基于纳米管的电极具有高重量比电容和面积比电容（扫描速率为 5 mV s(-1) 时为 810 Fg(-1) 和 75 mF cm(-2)）以及出色的倍率性能（从 2 到 100 Ag-1 的电容保持率为 68%）。此外，在 2 至 100 Ag-1 的随机充电-放电 8000 次循环后，观察到可忽略不计的电容损失。
Due to the unique advantages of Pt, it plays an important role in fuel cells and microelectronics. Considering the fact that Pt is an expensive metal, a major challenging point nowadays is how to realize efficient utilization of Pt. In this paper, a cost-effective atomic layer deposition (ALD) process with a low N-2 filling step is introduced for realizing well-defined Pt nanotube arrays in anodic alumina nano-porous templates. Compared to the conventional ALD growth of Pt, much fewer ALD cycles and a shorter precursor pulsing time are required, which originates from the low N-2 filling step. To achieve similar Pt nanotubes, about half cycles and 10% Pt precursor pulsing time is needed using our ALD process. Meanwhile, the Pt nanotube array is explored as a current collector for supercapacitors based on core/shell Pt/MnO2 nanotubes. This nanotube-based electrode exhibits high gravimetric and areal specific capacitance (810 Fg(-1) and 75 mF cm(-2) at a scan rate of 5 mV s(-1)) as well as an excellent rate capability (68% capacitance retention from 2 to 100 Ag-1). Additionally, a negligible capacitance loss is observed after 8000 cycles of random charging-discharging from 2 to 100 Ag-1.