Development of a combined waterjet plasma scrubber for tetrafluoromethane and by‐product removal
Development of a combined waterjet plasma scrubber for tetrafluoromethane and by‐product removal
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开发用于去除四氟甲烷和副产物的组合水射流等离子体洗涤器
DOI：
10.1002/ep.11755
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发表时间：
2014
影响因子：
2.8
通讯作者：
Chae
中科院分区：
文献类型：
--
作者：
Y. Chun;Chae
全氟化合物（PFC）已广泛用于半导体制造工艺的等离子体蚀刻和化学气相沉积（CVD）气体。PFCs对全球变暖有重大影响，并且在大气中的寿命很长。此外，废水，包括氟，将造成地下水污染。长期饮用含有过量氟化物的水会导致牙齿和骨骼的氟中毒。在这项研究中，一个水射流滑动弧等离子体系统中，等离子体与水射流相结合，并有效地破坏CF 4的最佳操作条件进行了研究，通过扩大放电区域和产生大量的OH自由基。由水射流等离子体分解的CF 4产生氟化氢（HF）并溶解在水射流中。本系统采用电凝聚法和氢氧化钙法处理含氟化氢废水，效果良好。对于实验参数，水射流流速和输入功率用于水射流等离子体洗涤器，初始pH和电流密度用于电凝聚过程，反应pH和Ca（OH）2注射体积用于氢氧化钙过程。在参数实验中发现，总的CF 4分解效率为99.2%;气体中的副产物CO2和HF的去除效率分别为69.4%和78%;液体中的副产物HF的去除效率为99.3%。© 2013美国化学工程师学会环境规划，33：229-237，2014
Perfluorocompounds (PFCs) have been extensively used for plasma etching and chemical vapor deposition (CVD) gases for the semiconductor manufacturing processes. PFCs have significant effects on global warming, and have very long atmospheric lifetimes. Moreover, the wastewater, including fluorine, would be caused by groundwater pollution. The long‐term consumption of water containing excessive fluoride can lead to fluorosis of the teeth and bones. In this study, a waterjet gliding arc plasma system in which plasma is combined with waterjet was developed, and the optimum operating conditions for efficient CF4 destruction were investigated by enlarging the discharge region and producing a large amount of OH radicals. The CF4 decomposed by the waterjet plasma produces hydrogen fluoride (HF) and is dissolved in the waterjet. The present system in the work utilized electrocoagulation and calcium hydroxide, which is very effective for getting rid of HF from wastewater. For the experimental parameters, the waterjet flow rate and input power were used for the waterjet plasma scrubber, the initial pH and current density for the electrocoagulation process, and the reaction pH and Ca(OH)2 injection volume for the calcium hydroxide process. It was found in the parametric experiment that the total CF4 decomposition efficiency was 99.2%; the removal efficiencies of CO2 and HF, which are the by‐products in the gas, were 69.4 and 78%, respectively; and the removal efficiency of HF, which is the by‐product in the liquid, was 99.3%. © 2013 American Institute of Chemical Engineers Environ Prog, 33: 229–237, 2014
大气压下产生水等离子体用于 HFC 破坏
DOI：
--
发表时间：
2008
期刊：
Thin Solid Films 516(13)
影响因子：
--
作者：
Kawanishi;M;渡辺隆行;Takayuki Watanabe and Taira Tsuru
通讯作者：
Takayuki Watanabe and Taira Tsuru