Application of the Taguchi analytical method for optimization of effective parameters of the chemical vapor deposition process controlling the production of nanotubes/nanobeads.
Application of the Taguchi analytical method for optimization of effective parameters of the chemical vapor deposition process controlling the production of nanotubes/nanobeads.
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应用田口分析方法优化控制纳米管/纳米珠生产的化学气相沉积过程的有效参数。
DOI：
10.1166/jnn.2005.035
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发表时间：
2005
影响因子：
--
通讯作者：
R. Zacharia
中科院分区：
文献类型：
--
作者：
M. Sharon;P. Apte;S. Purandare;R. Zacharia
利用田口分析法对化学气相沉积系统的七个可变参数进行了优化，以获得所需的产品，碳纳米管或碳纳米珠。观察到几乎所有选定的参数都会影响碳纳米管的生长。然而，其中，前驱体的性质（外消旋，R或工业级樟脑）和载气（氢气，氩气和氩/氢的混合物）似乎是影响碳纳米管生长的更重要的参数。然而，对于纳米珠的生长，在七个参数中，只有两个，即，催化剂（铁、钴和镍的粉末）和温度（1023 K、1123 K和1273 K）是最有影响的参数。衬底表面上的系统缺陷或岛增强新型碳材料的成核。分别通过方差分析（ANOVA）和平均值分析（ANOM）获得工艺参数的定量贡献以及最佳因素水平。
Seven variable parameters of the chemical vapor deposition system have been optimized with the help of the Taguchi analytical method for getting a desired product, e.g., carbon nanotubes or carbon nanobeads. It is observed that almost all selected parameters influence the growth of carbon nanotubes. However, among them, the nature of precursor (racemic, R or Technical grade camphor) and the carrier gas (hydrogen, argon and mixture of argon/hydrogen) seem to be more important parameters affecting the growth of carbon nanotubes. Whereas, for the growth of nanobeads, out of seven parameters, only two, i.e., catalyst (powder of iron, cobalt, and nickel) and temperature (1023 K, 1123 K, and 1273 K), are the most influential parameters. Systematic defects or islands on the substrate surface enhance nucleation of novel carbon materials. Quantitative contributions of process parameters as well as optimum factor levels are obtained by performing analysis of variance (ANOVA) and analysis of mean (ANOM), respectively.