Miniature Fabry-Perot pressure sensor created by using UV-molding process with an optical fiber based mold
Miniature Fabry-Perot pressure sensor created by using UV-molding process with an optical fiber based mold
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DOI：
10.1364/oe.20.014573
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发表时间：
2012-06-18
期刊：
影响因子：
3.8
通讯作者：
Yu, M.
中科院分区：
文献类型：
--
作者：
Bae, H.;Yu, M.
提出了一种利用紫外光模压聚合物工艺在光纤前端制作预写布拉格光栅的微型法布里-珀罗压力传感器。该模具是通过将直径80 μ m的光纤与氧化锆套圈集成而构建的。基于光纤的模具使得可以使用光学对准方法来监测模具侧和复制侧光纤之间的耦合强度，从而呈现具有亚微米精度的无掩模对准过程。压力传感器采用聚合物-金属复合薄膜片。整个传感器的直径约为200 μ m。实验研究表明，该传感器在1.9- 7.9psi的压力范围内具有良好的线性，灵敏度为0.0106 μ m/psi。光纤布拉格光栅用于同时温度测量或补偿压力读数中的温度效应。该传感器有望使许多需要微型和廉价传感器进行可靠压力测量的领域受益，特别是生物医学应用。2012美国光学学会Optical Society of America
We present a miniature Fabry-Perot pressure sensor fabricated at the tip of an optical fiber with a pre-written Bragg grating by using UV-molding polymer process. The mold is constructed by integrating an optical fiber of 80 mu m diameter with a zirconia ferrule. The optical fiber based mold makes it possible to use optical aligning method to monitor the coupled intensity between the mold-side and replica-side fibers, rendering a maskless alignment process with a submicrometer accuracy. A polymer-metal composite thin diaphragm is employed as the pressure transducer. The overall sensor size is around 200 mu m in diameter. Experimental study shows that the sensor exhibits a good linearity over a pressure range of 1.9-7.9 psi, with a sensitivity of 0.0106 mu m/psi. The fiber Bragg grating is exploited for simultaneous temperature measurements or compensation for temperature effects in pressure readings. The sensor is expected to benefit many fronts that require miniature and inexpensive sensors for reliable pressure measurement, especially biomedical applications. (C)2012 Optical Society of America