MEMS/MOEMS application to optical communication
MEMS/MOEMS application to optical communication
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MEMS/MOEMS在光通信中的应用
DOI：
10.1117/12.442944
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
H. Fujita
中科院分区：
文献类型：
--
作者：
H. Fujita
本文简要介绍了当前微机电系统技术及其在光学领域的应用。光学应用是MEMS最重要的应用之一，原因有二：一方面，微机技术可以为光学系统提供高性能和新功能；另一方面，这些光学微系统可以满足光通信网络、显示、数据存储和传感器的市场需求。讨论了基于mems的器件在光通信网络中的应用机会。介绍了MEMS光开关的一些具体实例。
The paper describes brief summary of current MEMS technology and its application to optics. The optical application is one of the most important applications of MEMS because of two reasons; one is that the micromachine technology can provide high performances and new functionalities for optical systems and the other is that those optical microsystems can satisfy market demands for optical communication networks, displays, data storage and sensors. Opportunities for MEMS-based devices in optical communication networks are discussed. Some specific examples of MEMS optical switches are described.