A novel e-band nearfield scanner for wafer probed on-chip antenna characterisation
A novel e-band nearfield scanner for wafer probed on-chip antenna characterisation
复制标题
用于晶圆探测片上天线表征的新型 e 波段近场扫描仪
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
T. Stander
中科院分区：
文献类型：
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作者：
K. A. Ladds;H. Nel;T. Stander
我们提出了一种新的设计，用于表征毫米波片上天线，集成到一个传统的探针台的近场扫描探针，只需更换一个单一的晶圆探针。所提出的探头是由四分之一波长间隔的接地平面支持的四分之一波长宽的反射器，其创建前视波束图案。AUT上的能量的这种偏离法线的入射引导卡盘的反射远离探针。E波段片上天线的远场模拟和近场计算结果之间的比较表明，在没有探头校正的情况下，主波束宽度在0.27 dB以内。
We present a novel design for a nearfield scanning probe for characterising mm-wave on-chip antennas that integrates into a conventional probe station, with only replacement of a single wafer probe required. The proposed probe is a quarter-wave wide monopole backed by a quarter-wave spaced ground plane, which creates a forward-looking beam pattern. This off-normal incidence of energy on the AUT directs reflection off the chuck away from the probe. Comparison between farfield simulated and nearfield-calculated results of an E-band on-chip antenna indicate correspondence to within 0.27 dB in the main beam width without probe correction.