Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family
Fluid drive chips containing multiple pumps and switching valves for Biochemical IC Family
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用于生化 IC 系列的包含多个泵和开关阀的流体驱动芯片
DOI：
10.1109/memsys.2000.838610
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发表时间：
2000
期刊：
影响因子：
--
通讯作者：
S. Maruo
中科院分区：
文献类型：
--
作者：
K. Ikuta;T. Hasegawa;T. Adachi;S. Maruo
作者提出并研制了一种基于家用IC芯片组概念的多功能微流控器件“生化IC系列”。目前已开发出多种类型的生化IC，包括反应器、浓缩器和单向阀等多种微流控装置。利用这些芯片合成了一种萤火虫发光酶。首次研制成功处理化学流体的新型芯片，并对芯片的基本性能进行了实验验证。采用形状记忆合金(SMA)微执行器实现微驱动。开发了一种新的微立体光刻技术(混合IH工艺)，用于制造由紫外光聚合物和其他微器件组成的三维复合结构，并用于芯片的整体制造。泵芯片成功地使化学液体流过相连的芯片。开关阀芯片更换反应迅速通过。通过使用这些生化IC芯片，化学家可以在自己的实验室中构建各种反应系统的新时代将到来。
Versatile micro fluidic device "Biochemical IC Family" based on the concept of family IC chip-set has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been developed. A luminous enzyme of firefly was synthesized by using these chips. New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. New micro stereo lithography (Hybrid IH Process) to make 3D composite structure consisting UV polymer and other micro parts was developed and was utilized for total chip fabrication. The pump chip succeeded to flow chemical liquids through the connected chips. The switching valve chip changed reaction passes quickly. By using these biochemical IC chips, new era in where various kind of reaction system can be constructed by the chemists in their own laboratory will come.