Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes
Fabrication of high-Q film bulk acoustic resonator (FBAR) filters with carbon nanotube (CNT) electrodes
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DOI：
10.1109/ultsym.2010.5935514
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发表时间：
2010-10
期刊：
影响因子：
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通讯作者：
L. Garcia-Gancedo;F. Al-Naimi;A. Flewitt;W. Milne;G. Ashley;J. K. Luo;X. Zhao;J. R. Lu
中科院分区：
文献类型：
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作者：
L. Garcia-Gancedo;F. Al-Naimi;A. Flewitt;W. Milne;G. Ashley;J. K. Luo;X. Zhao;J. R. Lu
具有碳纳米管(CNT)电极的FBAR器件已经被开发出来，目的是利用碳纳米管与其他已知材料相比的低密度和高声阻抗。通过比较两组相同的器件，一组是用铬/金双层电极制作的FBAR，另一组是用CNT电极制作的FBAR，研究了碳纳米管对FBAR器件频率响应的影响。结果表明，碳纳米管具有较高的弹性刚度，对FBARs膜表面的行波有显著的衰减作用。利用COMSOL多物理软件对制作的器件进行了有限元分析，数值结果与实验结果相吻合。
FBAR devices with carbon nanotube (CNT) electrodes have been developed with the aim of taking advantage of the low density and high acoustic impedance of the CNTs compared to other known materials. The influence of the CNTs on the frequency response of the FBAR devices was studied by comparing two identical sets of devices, one set comprised FBARs fabricated with chromium/gold bilayer electrodes, and the second set comprised FBARs fabricated with CNT electrodes. It was found that the CNTs had a significant effect on attenuating travelling waves at the surface of the FBARs membranes due to their high elastic stiffness. Finite element analysis of the devices fabricated was carried out using COMSOL Multiphysics, and the numerical results confirmed the experimental results obtained.