High-rate metal evaporation induced by high-pressure hydrogen glow discharge plasma and its application to formation of metallic fine particle and porous film

High-rate metal evaporation induced by high-pressure hydrogen glow discharge plasma and its application to formation of metallic fine particle and porous film
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高压氢辉光放电等离子体诱导的高速金属蒸发及其在金属微粒和多孔薄膜形成中的应用

DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
and K. Yasutake
and K. Yasutake
中科院分区:
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文献类型:
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作者:
H. Ohmi;H. Kakiuchi;and K. Yasutake

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