Broadband all-electronically tunable MEMS terahertz quantum cascade lasers
Broadband all-electronically tunable MEMS terahertz quantum cascade lasers
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DOI：
10.1364/ol.39.003480
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发表时间：
2014-06-15
期刊：
影响因子：
3.6
通讯作者：
Hu, Qing
中科院分区：
文献类型：
--
作者：
Han, Ningren;de Geofroy, Alexander;Hu, Qing
在这项工作中，我们展示了全电子调谐太赫兹量子级联激光器（THz QCL）与MEMS调谐器结构。两级MEMS调谐器装置通过由MEMSCAP公司执行的商业开放铸造工艺制造。这为具有高精度对准方案的THz QCL的MEMS调谐器制造提供了廉价、快速和可靠的方法。为了以电子方式致动MEMS调谐器装置，将开环低温压电纳米定位台与装置芯片集成。我们的实验结果表明，至少240 GHz的单模连续电子调谐可以实现在低温环境（类似4 K）没有模式跳变。这为实现用于光谱和相干层析成像应用的交钥匙台式可调谐THz相干源迈出了重要一步。(C)2014年美国光学学会
In this work, we demonstrate all-electronically tunable terahertz quantum cascade lasers (THz QCLs) with MEMS tuner structures. A two-stage MEMS tuner device is fabricated by a commercial open-foundry process performed by the company MEMSCAP. This provides an inexpensive, rapid, and reliable approach for MEMS tuner fabrication for THz QCLs with a high-precision alignment scheme. In order to electronically actuate the MEMS tuner device, an open-loop cryogenic piezo nanopositioning stage is integrated with the device chip. Our experimental result shows that at least 240 GHz of single-mode continuous electronic tuning can be achieved in cryogenic environments (similar to 4 K) without mode hopping. This provides an important step toward realizing turn-key bench-top tunable THz coherent sources for spectroscopic and coherent tomography applications. (C) 2014 Optical Society of America