Statistical Approach Calculating Ground Surface Roughness of Ultrasonic-Assisted Micro-Grinding
Statistical Approach Calculating Ground Surface Roughness of Ultrasonic-Assisted Micro-Grinding
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DOI：
10.4028/www.scientific.net/amr.325.600
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发表时间：
2011-08
期刊：
影响因子：
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通讯作者：
K. Shimada;Tianfeng Zhou;Jixin Yan;T. Kuriyagawa
中科院分区：
文献类型：
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作者：
K. Shimada;Tianfeng Zhou;Jixin Yan;T. Kuriyagawa
微细磨削是一种加工亚毫米结构的加工方法，它可以适用于各种材料，具有柔性成形能力。然而，微小型刀具在磨削力作用下容易弯曲，导致形状精度和磨削表面粗糙度较低。为了解决这些问题，将超声辅助应用于微细磨削。提出了一种利用统计方法从理论上计算磨削表面粗糙度的方法，阐明了超声波辅助磨削表面改善的机理。最后，利用自行研制的超声辅助微磨削装置对理论计算进行了实验验证。
Micro-grinding is a machining method to create submillimeter structures, and it can be applicable to various kinds of materials with a flexible forming ability. However, the micro tool may be easily bended by the grinding force, which results in relative low form accuracy and worse ground surface roughness. To solve these problems, ultrasonic assistance was applied to micro-grinding. This paper proposes a method to calculate ground surface roughness theoretically using statistical approach, and the ground surface improving mechanism of ultrasonic assistance was clarified. Finally, the theoretical calculation was confirmed experimentally using a developed ultrasonic-assisted micro-grinding device.