The response mechanism of surface acoustic wave gas sensors in real time
The response mechanism of surface acoustic wave gas sensors in real time
复制标题
表面声波气体传感器实时响应机制
DOI：
10.7567/1347-4065/aaf223
复制
发表时间：
2019-01-01
影响因子：
1.5
通讯作者：
He, Shitang
中科院分区：
文献类型：
--
作者：
Qi, Xiaolin;Liu, Jiansheng;He, Shitang
建立了描述声表面波(SAW)气体传感器实时响应机理的仿真模型。该模型基于微扰理论、朗缪尔公式和基本输运方程。利用微扰理论描述了传感器输出与探测器表面质量负载之间的关系。用朗缪尔公式和基本输运方程描述了气体在敏感膜上的吸附-脱附行为。根据这些理论，利用COMSOL软件进行有限元计算，得到了质量载荷曲线。通过配置镀膜氧化锌量子点的声表面波气体传感器，测量了吸附和解吸甲基膦酸二甲酯所引起的频移。在气敏实验中观察到了良好的重复性。仿真曲线与实验结果吻合较好。
A simulation model to describe the real-time response mechanism of the surface acoustic wave (SAW) gas sensors was established. This model was based on the perturbation theory, the Langmuir formula and the fundamental transport equations. Perturbation theory was utilized to describe the relationship between the sensor’s output and the mass loading on the detector’s surface. The Langmuir formula and fundamental transport equations were quoted to depict the adsorption–desorption behavior of gas on the sensitive film. According to these theories, the mass loading curve was obtained by using the finite element method with COMSOL. By configuring a SAW gas sensor coated with zinc oxide quantum dots, an experiment was performed to measure the frequency shifts caused by adsorbing and desorbing dimethyl methyl phosphonate. Excellent repeatability was observed in gas sensing experiments. The simulation curve is consistent with the experimental results.