Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect
Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect
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DOI：
10.4028/www.scientific.net/amr.320.377
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发表时间：
2011-08
期刊：
影响因子：
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通讯作者：
Jindong Xin;Qinggang Liu;Chao Liu;T. Li;Shiyu Liu
中科院分区：
文献类型：
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作者：
Jindong Xin;Qinggang Liu;Chao Liu;T. Li;Shiyu Liu
发现在表面等离子体共振效应中，反射光的p分量的相位随金属膜厚度的变化而变化，而s分量的相位几乎不变。本文以S偏振光为参考光，采用干涉法将相位的变化转化为干涉条纹位置的变化，进而推算出薄膜厚度，仿真结果表明，通过对相位数据进行分段二次拟合，膜厚在30 ~ 80纳米范围内的误差不大于0.33纳米。
It is found that the phase position of p-component of reflected light changes with the metal film thickness, while the phase position of s-component almost doesn’t change in the Surface Plasmon Resonance effect. S-polarized light is taken as reference and interferometry is adopted to turn the change of the phase position into the change of interference fringes position in the paper, and the film thickness can be derived from it. The simulation results indicated that, through making use of piecewise quadratic fitting on the phase data, the inaccuracy with the range of film thickness is between 30 and 80 nanometers is not more than 0.33 nm.