Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer.
Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer.
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DOI：
10.1364/oe.23.004065
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发表时间：
2015-02
期刊：
影响因子：
3.8
通讯作者：
Yangjin Kim;K. Hibino;N. Sugita;M. Mitsuishi
中科院分区：
文献类型：
--
作者：
Yangjin Kim;K. Hibino;N. Sugita;M. Mitsuishi
本文用过量分数法和波长调谐斐索干涉仪测量了厚度为6 mm、直径为10 mm的透明板的绝对光学厚度。通过波长扫描测量由中心波长处的群折射率定义的光学厚度。利用相移技术测量了由寻常折射率定义的光学厚度偏差。利用Sellmeier方程和最小二乘拟合方法，对离散傅里叶分析法和相移法测量的两种光学厚度进行了综合，得到了光学厚度与寻常折射率的关系。
The absolute optical thickness of a transparent plate 6-mm thick and 10 mm in diameter was measured by the excess fraction method and a wavelength-tuning Fizeau interferometer. The optical thickness, defined by the group refractive index at the central wavelength, was measured by wavelength scanning. The optical thickness deviation, defined by the ordinary refractive index, was measured using the phase-shifting technique. Two kinds of optical thicknesses, measured by discrete Fourier analysis and the phase-shifting technique, were synthesized to obtain the optical thickness with respect to the ordinary refractive index using Sellmeier equation and least-square fitting.