Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers
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基于湿度驱动介孔二氧化硅/硅双层的悬臂弯曲
DOI：
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发表时间：
2016
影响因子：
3.1
通讯作者：
O. Paris
中科院分区：
文献类型：
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作者：
C. Ganser;Gerhard Fritz;Roland Morak;P. Sharifi;B. Marmiroli;B. Sartori;H. Amenitsch;T. Griesser;C. Teichert;O. Paris
我们使用软模板结合蒸发诱导自组装的方法来制备介孔膜包含圆柱形孔与椭圆形截面上有序的孔晶格。该膜使用浸涂沉积在基于硅的商业原子力显微镜（AFM）杠杆上。这种双层悬臂梁安装在湿度控制的AFM，其偏转作为相对湿度的函数进行测量。我们还研究了一个类似的薄膜体硅衬底上使用掠入射小角X射线散射（GISAXS），以确定纳米结构参数的薄膜，以及水吸附诱导的变形的有序介孔晶格。使用简单的双层弯曲理论，中孔层的应变与悬臂梁偏转有关。我们还开发了一个简单的定量模型悬臂梁偏转，只需要悬臂梁的几何形状和纳米结构参数的多孔层作为输入参数。
We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection is measured as a function of relative humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous layer is related to the cantilever deflection using simple bilayer bending theory. We also develop a simple quantitative model for cantilever deflection which only requires cantilever geometry and nanostructural parameters of the porous layer as input parameters.
影响因子：
16.6
作者：
Harrington, Matthew J.;Razghandi, Khashayar;Burgert, Ingo
通讯作者：
Burgert, Ingo