Uncertainty analysis in the evaluation of pitch deviation and out-of-flatness of planar scale gratings by Fizeau interferometry
Uncertainty analysis in the evaluation of pitch deviation and out-of-flatness of planar scale gratings by Fizeau interferometry
复制标题
斐索干涉测量平面光栅节距偏差和不平整度的不确定度分析
DOI：
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
Yuan-Liu Chen and Wei Gao
中科院分区：
文献类型：
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作者：
Xiuguo Chen;Yuki Shimizu;Yuan-Liu Chen and Wei Gao
