EVALUATION OF RELATIVE VOLUME FRACTION OF TETRAGONAL PHASE AND RHOMBOHEDRAL PHASE IN Pb(Zr,Ti)O3 FILM BY RAMAN SPECTROSCOPY
EVALUATION OF RELATIVE VOLUME FRACTION OF TETRAGONAL PHASE AND RHOMBOHEDRAL PHASE IN Pb(Zr,Ti)O3 FILM BY RAMAN SPECTROSCOPY
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拉曼光谱评价Pb(Zr,Ti)O3薄膜中四方相和菱面体相的相对体积分数
DOI：
10.1080/10584587.2009.484672
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发表时间：
2010
影响因子：
0.7
通讯作者：
Takashi Yamamoto
中科院分区：
文献类型：
--
作者：
M. Nishide;H. Takeuchi;T. Tai;T. Katoda;S. Yokoyama;S. Yasui;H. Funakubo;K. Nishida;Takashi Yamamoto
摘要 使用显微拉曼光谱评估外延 Pb(Zr,Ti)O3 (PZT) 厚膜中四方相 (V T) 的体积分数。当Zr/(Zr+Ti)比小于0.43和大于0.6时，晶体结构分别为四方晶系和菱方晶系单相。 Zr/(Zr+Ti)比在0.43～0.6之间存在两相共存。研究发现，随着Zr/(Zr+Ti)比率的增加，主要晶相从四方晶相转变为菱形晶相。然而，晶体的对称性并不均匀。发现V T 沿膜厚方向从基底附近到膜表面逐渐变化。
ABSTRACT Volume fractions of tetragonal phase (V T) in the epitaxial Pb(Zr,Ti)O3 (PZT) thick films were evaluated using micro-Raman spectroscopy. The crystal structure was the single phase of tetragonal and rhombohedral when Zr/(Zr+Ti) ratio was under 0.43 and over 0.6, respectively. There was the two phases coexistence between 0.43 and 0.6 of Zr/(Zr+Ti) ratio. It was found that the dominant crystal phase change from tetragonal to rhombohedral one with increasing the Zr/(Zr+Ti) ratio. However, crystal symmetry was not uniform; V T was found to gradually change along film thickness direction from near the substrate to the film surface.