Influence of solvents on deposition mechanism of Al-doped ZnO films synthesized by cold wall aerosol-assisted chemical vapor deposition
Influence of solvents on deposition mechanism of Al-doped ZnO films synthesized by cold wall aerosol-assisted chemical vapor deposition
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DOI：
10.1016/j.tsf.2013.07.002
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发表时间：
2013-09-02
期刊：
影响因子：
2.1
通讯作者：
Wang, Na
中科院分区：
文献类型：
--
作者：
Qin, Xiu Juan;Zhao, Lin;Wang, Na
分别以甲醇、乙醇、2-甲氧基乙醇和异丙醇为前驱体溶液，采用冷壁气溶胶辅助化学气相沉积法在玻璃基板上合成了Al掺杂ZnO薄膜。讨论了沉积机理和溶剂对沉积的影响，发现薄膜的(0 0 2)取向生长程度受前驱体溶液粘度的显着影响。随着前驱体溶液粘度的增加，沉积速度降低。对于从高粘度溶液沉积的样品，颗粒倾向于均匀分布在基材上，而低粘度溶液则导致颗粒团聚。 2-甲氧基乙醇体系产生的一些液滴由于较大的表面张力而凝结。尺寸显着不同的颗粒沉积在薄膜上。皇冠版权所有 (C) 2013 由 Elsevier B.V. 出版。保留所有权利。
Using methanol, ethanol, 2-methoxyethanol and isopropanol as solvents in the precursor solutions, respectively, Al-doped ZnO films were synthesized on glass substrates by cold wall aerosol-assisted chemical vapor deposition. The deposition mechanism and the influence of solvents on deposition were discussed, finding that the degree of (0 0 2) orientation growth of the film was significantly influenced by the viscosity of precursor solutions. The deposition velocity decreased as the viscosity of precursor solution increased. Grains tended to uniformly distributed over the substrates for the samples deposited from high-viscosity solutions, while low-viscosity solutions resulted in grain agglomeration. Some droplets generated from 2-methoxyethanol system coagulated due to the greater surface tension. Grains that differ significantly in size were deposited on the film. Crown Copyright (C) 2013 Published by Elsevier B.V. All rights reserved.