Negative ion density distribution in a volume negative ion source-its dependence on plasma parameters
Negative ion density distribution in a volume negative ion source-its dependence on plasma parameters
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体积负离子源中的负离子密度分布-其对等离子体参数的依赖性
DOI：
10.1109/plasma.2003.1228694
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Y. Takeiri
中科院分区：
文献类型：
--
作者：
S. Mori;Y. Tauchi;O. Fukumasa;M. Hamabe;Y. Takeiri
仅给出摘要形式，如下所示。在体积负离子源中，H/sup -/离子通过将慢等离子体电子解离附着到高度振动激发的氢分子而在氢等离子体中形成，并且这些振动分子通过高能电子撞击产生。D/sup -/离子的产生被认为与H/sup -/离子的产生相同。研究D/sub 2/等离子体的产生和控制，了解H/sub 2/等离子体和D/sub 2/等离子体负离子体积产生的差异，对于发展高效的D/sub-/离子源具有重要意义。为此，我们讨论了H/sup -//D/sup -/产生的同位素效应，并通过测量源中负离子密度来阐明负离子产生与等离子体参数的关系。
Summary form only given, as follows. In a volume negative ion source, H/sup -/ ions are formed in hydrogen plasmas by dissociative attachment of slow plasma electrons to highly vibrationally excited hydrogen molecules, and these vibrational molecules are produced by energetic electron impact. Production of D/sup -/ ions is believed to be the same as that of H/sup -/ ions. To develop efficient D/sup -/ ion sources, it is important to study production and control of D/sub 2/ plasmas, and to understand difference in the negative ion volume production between H/sub 2/ plasmas and D/sub 2/ plasmas. For this purpose, we discuss isotope effect of H/sup -//D/sup -/ production and to clarify the dependence of negative ion production on plasma parameters by measuring negative ion densities in the source.