Durability under mechanical bending of the indium tin oxide films deposited on polymer substrate by thermionically enhanced sputtering
Durability under mechanical bending of the indium tin oxide films deposited on polymer substrate by thermionically enhanced sputtering
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DOI：
10.1016/j.orgel.2010.01.008
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发表时间：
2010-04-01
影响因子：
3.2
通讯作者：
He, J. L.
中科院分区：
文献类型：
--
作者：
Lan, Y. F.;Peng, W. C.;He, J. L.
对柔性显示面板的新兴需求已经产生了对能够在聚合物材料上沉积高质量透明导电涂层（TCO）的涂覆技术的需求。为了提高ITO薄膜在静态和动态机械弯曲下的电学和光学性能，采用电子发射（TE）增强的直流磁控溅射系统在聚对苯二甲酸乙二酯（PET）基底上制备了ITO薄膜，实验结果表明，在PET基底上制备的ITO薄膜在可见光区的平均透过率为83%和70%，电阻率分别为4.5 × 10（4）和1.7 × 10（3）Ω cm。相比之下，静态弯曲测试显示，对于具有和不具有TE的ITO涂覆的PET，临界曲率半径（R（c））为13.9和17.0 mm。动态弯曲测试表明，具有TE的ITO涂覆的PET的耐久性超过1200次循环，而不具有TE的ITO涂覆的PET的相应次数小于50次循环。这些结果证明，使用TE方法沉积的ITO膜比不使用TE沉积的ITO膜表现出更高的结晶度和膜粘附性。TE提高了ITO涂层的光学和电学性能，并延长了其在机械弯曲下的耐久性。(C)2010年爱思唯尔B。V.保留所有权利。
The emerging demand for flexible display panels has created a demand for coating techniques capable of depositing high-quality transparent conductive coatings (TCOs) on polymeric materials. This study demonstrates indium tin oxide (ITO) films deposited on polyethylene terephthalate (PET) substrates using a thermionic emission (TE) enhanced DC magnetron sputtering system to improve electrical and optical properties under static and dynamic mechanical bending.Experimental results show that the ITO-coated PET specimen prepared with TE and without TE presents an average transmittance in the visible region of the spectrum of 83% and 70%, and an electrical resistivity of 4.5 x 10 (4) and 1.7 x 10 (3) Omega cm, respectively. By contrast, the static bending test revealed that the critical radius of curvature (R(c)) is 13.9 and 17.0 mm for the ITO-coated PET with and without TE. The dynamic bending test showed that the ITO-coated PET with TE is durable for more than 1200 cycles, while the corresponding number for the ITO-coated PET without TE is smaller than 50 cycles for the ITO-coated PET without TE. These results evidence that the ITO film deposited using the TE approach exhibits a higher degree of crystallinity and film adhesion than that deposited without TE. TE improves optical and electrical properties of the ITO coatings and their longer durability under mechanical bending. (C) 2010 Elsevier B. V. All rights reserved.