Mass Separation of Water Cluster Ion Beam Using Two Rotating Electric Fields and Sputtering of a Polymer Thin Film
Mass Separation of Water Cluster Ion Beam Using Two Rotating Electric Fields and Sputtering of a Polymer Thin Film
复制标题
利用两个旋转电场的水团簇离子束质量分离和聚合物薄膜的溅射
DOI：
10.1380/ejssnt.2020.101
复制
发表时间：
2020
影响因子：
0.7
通讯作者：
K. Hara
中科院分区：
文献类型：
--
作者：
M. Nojima;H. Mita;K. Hara
离子束团簇尺寸的选择是控制溅射速度或聚合物材料损伤层的关键因素。我们利用一种新的原理研制了一种双旋转电场(ReFS)型的质谱计或滤光器。通过优化REF的频率，REF-MS可以连续分离典型尺寸的团簇离子。在这项研究中，我们开发了一种电喷雾电离(ESI)炮柱，用REF-MS优化了水离子束的团簇尺寸。利用优化的聚焦频率，在典型的水分子团簇上观察到了大小选定的团簇的环状图案。将模拟结果与有限差分模拟结果进行了比较。我们使用大小过滤的水团簇离子束溅射了一种旋涂聚合物薄膜。在尺寸优化的水团簇离子束溅射的聚苯乙烯薄膜上观察到了溅射坑。在这里，我们讨论了对于典型数目的水团簇，离子束的溅射速度与团簇大小的关系。
Selection of the cluster size of an ion beam is a key factor for controlling sputtering speeds or the damaged layer of polymer materials. We developed a two rotating electric fields (REFs) type of mass spectrum (MS) filter or analyzer using a novel principle. The REF-MS can continuously separate typical sizes of cluster ions by optimizing the frequencies of the REFs. In this study, we developed an electrospray ionization (ESI) gun column to optimize the cluster sizes of a water ion beam by REF-MS. Annular ring patterns of size-selected clusters were observed using optimized focusing frequencies on typical water molecule clusters. The patterns were compared with the results of the finite difference simulation method. We sputtered a spin-coated polymer film using a size-filtered water cluster ion beam. A sputtering crater was observed on the polystyrene film sputtered by the size-optimized water cluster ion beam. Here, we discuss the cluster size dependence of sputtering speeds for an ion beam for typical numbers of water clusters.