PULL-TEST ADHESION MEASUREMENTS OF DIAMONDLIKE CARBON FILMS ON SILICON CARBIDE, SILICON NITRIDE, ALUMINUM OXIDE, AND ZIRCONIUM OXIDE
PULL-TEST ADHESION MEASUREMENTS OF DIAMONDLIKE CARBON FILMS ON SILICON CARBIDE, SILICON NITRIDE, ALUMINUM OXIDE, AND ZIRCONIUM OXIDE
复制标题
类金刚石碳膜在碳化硅、氮化硅、氧化铝和氧化锆上的拉力试验附着力测量
DOI：
--
复制
发表时间：
1994
期刊：
影响因子：
--
通讯作者：
J. Dierks
中科院分区：
文献类型：
--
作者：
R. Erck;F. Nichols;J. Dierks
通过400 eV甲烷（CH4）离子轰击各种光滑和粗糙的陶瓷以及涂覆有Si或Ti层的陶瓷，形成氢化的非晶碳或类金刚石碳（DLC）膜。通过粘合销法测量粘附力。对于光滑的SiC和Si3N4测量到优异的粘附性，但是DLC对光滑的Al2O3和ZrO2的粘附性可以忽略不计。使用Si键合中间层对所有基材产生良好的粘附性，但Ti层由于DLC膜和Ti之间的键合不良而无效。由于界面是二维的，并且界面相的组成通常是未知的，因此本体热力学计算不能直接应用于界面处的键合。如果在产生碳化物相的假设下计算CH4和基底材料之间反应的标准焓ΔH°，则可以看出反应焓和相对粘附力之间的关系。大的正向骨密度与不良的粘附力有关...
Hydrogenated amorphous carbon or diamondlike carbon (DLC) films were formed by 400 eV methane (CH4) ion bombardment of various smooth and rough ceramics, as well as ceramics coated with a layer of Si or Ti. Adhesion was measured by a bonded‐pin method. Excellent adhesion was measured for smooth SiC and Si3N4, but adhesion of DLC to smooth Al2O3 and ZrO2 was negligible. The use of a Si bonding interlayer produced good adhesion to all the substrates, but a Ti layer was ineffective due to poor bonding between the DLC film and Ti. Bulk thermodynamic calculations are not directly applicable to bonding at the interface because the interface is two dimensional and the compositions of interfacial phases are generally not known. If the standard enthalpy ΔH° for the reaction between CH4 and the substrate material is calculated under the assumption that a carbide phase is produced, a relationship is seen between the reaction enthalpy and the relative adhesion. Large positive enthalpies are associated with poor adhes...