A quadrature compensation method to improve the performance of the butterfly vibratory gyroscope
A quadrature compensation method to improve the performance of the butterfly vibratory gyroscope
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DOI：
10.1016/j.sna.2020.112527
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发表时间：
2021-01-20
影响因子：
4.6
通讯作者：
Wu, Xuezhong
中科院分区：
文献类型：
--
作者：
Hou, Zhanqiang;Kuang, Yunbin;Wu, Xuezhong
提出了一种简单有效的静电调谐方法来实现蝶形振动陀螺仪的正交补偿。蝶形振动陀螺仪独特的对称结构使其成为一种高灵敏度的微机电系统陀螺仪。然而，在实际制造过程中，由于制造精度的限制，制造缺陷导致蝴蝶陀螺仪结构的几何形状不理想，从而导致正交误差。正交误差对蝶形振动陀螺仪的零率输出、检测分辨率和动态范围等性能有很大影响。对蝶形振动陀螺仪的正交误差进行了理论计算，分析了正交误差对陀螺仪性能的影响，建立了正交补偿的数学模型。为此，对蝶形振动陀螺仪的电极结构进行了优化，确定了调节轴电极区域的设计。然后，在蝶形振动陀螺仪上进行了正交补偿实验。实验结果表明，该方法可以将正交误差控制到最小。说明了在蝶形振动陀螺仪中进行正交补偿的可行性。通过对比实验测试，改进了蝶形振动陀螺仪的性能。偏置不稳定性从1.05？/h到0.53？/h后抑制正交误差。(c) 2021 Elsevier B.V.版权所有上标或下标可用
A simple and effective method for realizing the quadrature compensation of the butterfly vibratory gyroscope by electrostatic tuning is presented. The unique symmetrical structure of the butterfly vibratory gyroscope makes it a highly sensitive micro-electromechanical systems gyroscope. However, in the actual fabrication processes, due to the limited precision of the fabrication, the fabrication imperfections result in non-ideal geometries in the butterfly gyroscope structure, which leads to the quadrature error. The quadrature error has great influence on the performance of the butterfly vibratory gyroscope, such as the zero rate output, the detection resolution and the dynamic range. The quadrature error of the butterfly vibratory gyroscope is calculated theoretically, the influence of quadrature error on the performance of the gyroscope is analyzed, and the mathematical model of quadrature compensation is established. Therefore, the electrode structure of the butterfly vibratory gyroscope is optimized, and the design of the electrode areas of the adjusting axis is determined. Then, the experiment of quadrature compensation is carried out on the butterfly vibratory gyroscope. The experimental results show that the quadrature error can be controlled to the minimum. The feasibility of quadrature compensation in butterfly vibratory gyroscope is illustrated. According to the comparative experimental tested, the performance of the butterfly vibratory gyroscope is improved. The bias instability is reduced from 1.05?/h to 0.53?/h after suppresing the quadrature error. (c) 2021 Elsevier B.V. All rights reserved.Superscript/Subscript Available