A Study on the Effect of Electrolyte Concentration on Surface Integrity in Micro Electrochemical Discharge Machining
A Study on the Effect of Electrolyte Concentration on Surface Integrity in Micro Electrochemical Discharge Machining
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微电化学放电加工中电解质浓度对表面完整性影响的研究
DOI：
10.1016/j.procir.2016.02.146
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
M. Sundaram
中科院分区：
文献类型：
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作者：
Ketaki Rajendra Kolhekar;M. Sundaram
玻璃等非导电材料的微加工至关重要，因为它在微系统中有许多应用，包括生物医学设备，微反应器，微泵，微加速度计和MEMS。电解放电加工是一种很有前途的玻璃微细加工方法。然而，ECDM经常无意中引起表面起皱和表面损坏。研究了电解液浓度对微细孔加工表面完整性的影响。研究内容包括：表面粗糙度和微观缺陷分析、EDAX显微组织检测和纳米压痕硬度检测。结果发现，ECDM中较低的电解质浓度增强了化学蚀刻，导致表面粗糙。
Micro machining of nonconductive materials such as glass is critical as it has numerous applications in microsystems including biomedical devices, micro-reactors, micro-pumps, micro-accelerometers and MEMS. Electrochemical discharge machining (ECDM) is a promising process for the micromachining of glass. However, ECDM often inadvertently causes surface wrinkling and surface damages. This paper studies the effect of concentration of electrolyte in ECDM on the integrity of a micro machined hole surface. The study includes: analysis of surface roughness and micro-defects, microstructure by EDAX testing and hardness testing by nano indentation. It was found that lower electrolyte concentrations in ECDM enhance chemical etching that causes surface wrinkling.