Fabrication of single-walled carbon-nanotube-based pressure sensors
Fabrication of single-walled carbon-nanotube-based pressure sensors
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DOI：
10.1021/nl052171d
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发表时间：
2006-02-01
期刊：
影响因子：
10.8
通讯作者：
Hierold, C
中科院分区：
文献类型：
--
作者：
Stampfer, C;Helbling, T;Hierold, C
我们报告的制造和表征的基础上，个别单壁碳纳米管（SWNTs）的主动机电换能器元件的散装微机械压力传感器。机电传感器装置由吸附在100 nm厚的原子层沉积（ALD）圆形氧化铝（Al 2 O 3）膜顶部的单个电连接的SWNT组成，所述圆形氧化铝（Al 2 O 3）膜的半径在50-100 μ m的范围内。采用白色光干涉仪（WLI）测量膜在压差作用下的变形，并通过胀形试验对膜的力学性能进行表征。最后，我们进行了第一次机电测量应变金属单壁碳纳米管粘附到膜，并发现金属单壁碳纳米管的压阻应变计因子约为210。
We report on the fabrication and characterization of bulk micromachined pressure sensors based on individual single-walled carbon nanotubes (SWNTs) as the active electromechanical transducer elements. The electromechanical sensor device consists of an individual electrically connected SWNT adsorbed on top of a 100-nm-thick atomic layer deposited (ALD) circular alumina (Al2O3) membrane with a radius in the range of 50-100 mu m. A white light interferometer (WLI) was used to measure the deflection of the membrane due to differential pressure, and the mechanical properties of the device were characterized by bulge testing. Finally, we performed the first electromechanical measurements on strained metallic SWNTs adhering to a membrane and found a piezoresistive gauge factor of approximately 210 for metallic SWNTs.