Fabrication and characterization of piezoelectric nanogenerator based on Al/ZnO/Au structure

Fabrication and characterization of piezoelectric nanogenerator based on Al/ZnO/Au structure
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基于Al/ZnO/Au结构的压电纳米发电机的制备与表征

DOI:
10.1108/mi-11-2015-0092
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发表时间:
2017
期刊:
影响因子:
--
通讯作者:
G. Amin
G. Amin
中科院分区:
--
文献类型:
--
作者:
M. Zafar;M. Awais;M. Asif;Amir Razaq;G. Amin

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目的 这项研究工作的目的是利用 ZnO 纳米线 (NW) 的压电特性来收集能量。基于 Al/ZnO/Au 结构而不使用宿主层的压电纳米发电机 (NG) 的制造和表征是为了收集能量。所提出的方法具有充分的潜力来收集具有成本效益的能量。 设计/方法论/途径 ZnO NW 是在 Al 和 Au 涂层基底的薄层之间制造的,用于压电 NG 的开发。为了生长 ZnO 纳米线,在镀铝基板上制备 ZnO 种子层,然后通过水基化学生长方法生长 ZnO 纳米线。最后,使用 Au 顶电极形成 Al/ZnO/Au NG 结构。 Al 和 Au 电极分别用于与 ZnO NW 建立欧姆接触和肖特基接触。 发现 使用扫描电子显微镜观察所制造器件的表面形貌,并使用数字示波器、皮安表和电压表对样品进行电表征。进行能量收集实验以激发所提出的设备。所制造的压电敏感器件的最大开路电压高达5 V,最大短路电流高达30 nA,最大功率为150 nW。因此,还表明所制造的器件的输出通过施加应力而增加。所提出的工作将有助于开口捕获周围环境的机械能,为纳米/微型设备供电。这项研究工作表明,NG 有能力构建自供电纳米系统。它在生物传感和个人电子产品方面具有潜在的应用。 原创性/价值 简单且经济高效的压电NG的制造是通过Al/ZnO/Au结构完成的,而不使用宿主层。所提出的方法阐明了一种从自然环境中获取机械能的有效且具有成本效益的方法。
Purpose The purpose of this research work is to harvest energy using the piezoelectric properties of ZnO nanowires (NW). Fabrication and characterization of the piezoelectric nanogenerator (NG), based on Al/ZnO/Au structure without using hosting layer, were done to harvest energy. The proposed method has full potential to harvest the cost-effective energy. Design/methodology/approach ZnO NW were fabricated between the thin layers of Al- and Au-coated substrates for the development of piezoelectric NG. To grow ZnO NW, ZnO seed layer was prepared on the Al-coated substrate, and then ZnO NW were grown by aqueous chemical growth method. Finally, Au top electrode was used to conclude the Al/ZnO/Au NG structure. The Al and Au electrodes were used to establish the ohmic and Schottky contacts with ZnO NW, respectively. Findings Surface morphology of the fabricated device was done by using scanning electron microscopy, and electrical characterization of the sample was performed with digital oscilloscope, picoammeter and voltmeter. The energy harvesting experiment was performed to excite the presented device. The fabricated piezoelectric-sensitive device revealed the maximum open circuit voltage up to 5 V and maximum short circuit current up to 30 nA, with a maximum power of 150 nW. Consequently, it was also shown that the output of the fabricated device was increased by applying the stress. The presented work will help for the openings to capture the mechanical energy from the surroundings to power up the nano/micro-devices. This research work shows that NGs have the competency to build the self-powered nanosystems. It has potential applications in biosensing and personal electronics. Originality/value The fabrication of simple and cost-effective piezoelectric NG is done with a structure of Al/ZnO/Au without using hosting layer. The presented method elucidates an efficient and cost-effective approach to harvest the mechanical energy from the native environment.