Improvement of tribological performance of CrN coating via multilayering with VN
Improvement of tribological performance of CrN coating via multilayering with VN
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通过 VN 多层化提高 CrN 涂层的摩擦学性能
DOI：
10.1016/j.surfcoat.2012.03.010
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发表时间：
2013-09-01
影响因子：
5.4
通讯作者：
Zhao, Dongliang
中科院分区：
文献类型：
--
作者：
Qiu, Yuexiu;Zhang, Sam;Zhao, Dongliang
为了提高CrN涂层的摩擦学性能，采用磁控溅射法制备了CrN/VN多层结构。研究了双层周期分别为7、13和27 nm的CrN/VN多层涂层的力学性能和摩擦学性能。通过磁控溅射系统在SUS420和Si晶片（100）上沉积涂层。采用x射线衍射仪、扫描电镜、透射电镜和电子探针微量分析仪对其微观结构和化学成分进行了表征。球盘磨损试验用于摩擦学研究。用x射线光电子能谱对磨损碎片进行了分析。多层涂层的硬度为25.2 GPa，摩擦系数为0.21，而CrN涂层的硬度为16.7 GPa，摩擦系数为0.4。(C) 2012 Elsevier B.V.版权所有
To improve the tribological performance of CrN coating, VN was introduced to form the CrN/VN multilayer structure via magnetron sputtering. The CrN/VN multilayer coatings with bilayer periods of 7, 13 and 27 nm were investigated on the mechanical and tribological properties. The coatings were deposited on SUS420 and Si wafers (100) via in-line magnetron sputtering system. X-ray diffractometer, scanning electron microscopy, transmission electron microscopy and electron probe micro-analyzer were used to characterize the microstructures and chemical contents. Ball-on-disc wear test was used for tribological studies. The wear debris was analyzed by X-ray photoelectron spectroscopy. A hardness of 25.2 GPa and coefficient of friction of 0.21 were achieved for multilayered coating in contrast to 16.7 GPa in hardness and 0.4 in coefficient of friction for CrN coating. (C) 2012 Elsevier B.V. All rights reserved.