Design and Analysis of a Light-Operated Microgripper Using an Opto-Electrostatic Repulsive Combined Actuator.
Design and Analysis of a Light-Operated Microgripper Using an Opto-Electrostatic Repulsive Combined Actuator.
复制标题
采用光电斥力组合执行器的光控微夹具的设计与分析
DOI：
10.3390/mi12091026
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发表时间：
2021-08-27
期刊：
影响因子：
3.4
通讯作者：
Chen H
中科院分区：
文献类型：
--
作者：
Huang J;Jiang C;Li G;Lu Q;Chen H
微夹持器在微操作系统中起着至关重要的作用，然而，传统的驱动微夹持器的处理精度受到外部振动，由于需要连接线的外部电源。相比之下，光驱动具有远程非接触操作，无线能量传输和无感应电磁噪声的许多优点。提出了一种光电斥力复合驱动机构，并设计了一种新型的光电斥力驱动微夹持器。通过仿真和数值计算，研究了光控微夹钳的静态性能。微夹持器的总体尺寸为1.3 mm × 0.7 mm × 1.027 mm，可对光进行操作和夹持，夹持的微小物体尺寸范围为0 ~ 1000 μm。该微夹持器具有行程大、响应速度快、远程非接触操作、易与集成电路工艺集成、不受外界干扰等特点。此外，对PbLaZrTi（PLZT）陶瓷的光生电压进行了动态控制实验，实验结果表明，采用所提出的有效控制方法，可以获得稳定的光生电场。
The microgripper plays a critical role in micromanipulation systems; however, the handling accuracy of traditional driving microgrippers suffers from external vibration due to requiring connecting wires for an external power supply. By contrast, light driving has many advantages of remote non-contact manipulation, wireless energy transfer and no induced electromagnetic noise. In this study, an opto-electrostatic repulsive combined driving mechanism was proposed, and then a novel light-operated microgripper that used an opto-electrostatic repulsive actuator was designed and simulated. The static performance of the light-operated microgripper was investigated via simulation and numeric calculation results. The overall size of the microgripper was 1.3 mm × 0.7 mm × 1.027 mm, and the micro-objects ranging from 0 to 1000 μm in size could be manipulated and held using light. The proposed microgripper had many outstanding characteristics, such as a larger stroke, high response speed, remote non-contact manipulation, easy to integrate with an integrated circuit (IC) process and free from external interference. In addition, the dynamic control experiments of the photo-induced voltage of the PbLaZrTi (PLZT) ceramic were carried out, which shows that a stable electrical field could be obtained using the effective control methods that were developed.
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影响因子：
4.1
作者：
Cheong, Hau Ran;Teo, Choon Yee;Chee, Pei Song
通讯作者：
Chee, Pei Song
影响因子：
2.8
作者：
Shen, Teng;Li, Jiajie;Xie, Jinlong
通讯作者：
Xie, Jinlong
影响因子：
3.3
作者：
Jain, R. K.;Datta, S.;Dutta, A.
通讯作者：
Dutta, A.
DOI：
10.1007/s12541-020-00375-z
发表时间：
2020-07-15
影响因子：
1.9
作者：
Yurtsever, Ozgur;Kucuk, Haluk
通讯作者：
Kucuk, Haluk
影响因子：
4.6
作者：
Alogla, A. F.;Amalou, F.;Reuben, R. L.
通讯作者：
Reuben, R. L.