Microwave Sensor within a Microfluidic Chip for Biological Applications
Microwave Sensor within a Microfluidic Chip for Biological Applications
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用于生物应用的微流控芯片内的微波传感器
DOI：
10.3390/proceedings1040523
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
O. Français
中科院分区：
文献类型：
--
作者：
A. E. Fellahi;T. Bore;L. Rousseau;B. Pioufle;O. Français
提出了一种工作在射频区的小型化传感器，以满足皮升液体表征的需要。该传感器是基于共面波导（CPW）与微流体通道相结合，专用于微升液体表征与生物学和单细胞表征的角度。采用微工艺技术，在0.5mm厚的石英晶片上设计了Cr/Au电极传感器。传感器的原型已经制造和评价与乙醇/水的混合物在不同的乙醇摩尔分数。观察到的传感器的理论和测量的电响应之间的良好的协议。
A miniaturized sensor operating in Radio Frequency region (RF) is proposed to address the need in picoliter liquid characterization. The sensor is based on a coplanar waveguide (CPW) combined with a microfluidic channel dedicated to microliter liquid characterization with perspectives for biology and single cell characterization. Using microtechnology process, the sensor has been designed on a 0.5 mm thick quartz wafer with Cr/Au electrodes. A prototype of the sensor has been fabricated and evaluated with ethanol/water mixtures at different molar fractions of ethanol. A good agreement between theoretical and measured electrical response of the sensor is observed.