Optical scanner on a three-dimensional microoptical bench
Optical scanner on a three-dimensional microoptical bench
复制标题
三维微光学工作台上的光学扫描仪
DOI：
10.1109/jlt.2003.811793
复制
发表时间：
2003
影响因子：
4.7
通讯作者：
K. Hori
中科院分区：
文献类型：
--
作者：
M. Sasaki;T. Yamaguchi;J. H. Song;K. Hane;M. Hara;K. Hori
一个三维（3-D）的微光学工作台使用体微机械加工制备的构造展示了一个紧凑的光学设置。制备具有用于安装体元件的空间的预对准的微结构。一个3-D光刻技术应用具有良好的可重复性，使用原来开发的抗蚀剂喷涂系统。采用低压化学气相沉积法（LPCVD）生长的薄膜作为结构层，与三维体结构相结合。在热致动悬臂梁的自由端制作了一个面向激光二极管芯片的斜交悬臂梁。获得了大于30/spl deg/的光扫描角和100 Hz的截止频率。
A three-dimensional (3-D) microoptical bench prepared using bulk micromachining is constructed demonstrating a compact optical setup. Prealigned microstructures with space for mounting bulk elements are prepared. A 3-D photolithographic technique is applied with good repeatability using an originally developed resist spray-coating system. Films grown by low-pressure chemical-vapor deposition (LPCVD) are used as construction layers combining with 3-D bulk structures. A skew micromirror at the free end of a thermally actuated cantilever is fabricated facing to a laser diode chip. An optical-scan angle of more than 30/spl deg/ and a cutoff frequency of 100 Hz are obtained.