A CMOS 300-GHz 7 by 7 detector array for THz imaging

A CMOS 300-GHz 7 by 7 detector array for THz imaging
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用于太赫兹成像的 CMOS 300 GHz 7 x 7 探测器阵列

DOI:
10.1109/rfit.2017.8048280
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发表时间:
2017
期刊:
International Symposium on Radio-Frequency Integration Technology
影响因子:
--
通讯作者:
J. Rieh
J. Rieh
中科院分区:
--
文献类型:
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作者:
Kiryong Song;Jungsoo Kim;Doyoon Kim;M. Seo;J. Rieh

文献摘要

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在这项工作中,300-GHz的7×7成像探测器阵列已开发与65-nm CMOS工艺。每个像素是由一个相同的300 GHz的共栅差分直接检测器与贴片天线集成。模拟结果表明,该探测器的响应度为1,200 V/W,NEP为20 pW/Hz 05。芯片面积为4×4 mm 2,包括焊盘。利用所制备的7×7探测器阵列作为探测器,成功实现了300 GHz的实时反射成像。
In this work, a 300-GHz 7×7 imaging detector array has been developed with a 65-nm CMOS technology. Each pixel is made of an identical 300-GHz common-gate differential direct detector integrated with a patch antenna. The detector exhibits a 1,200 V/W responsivity and a 20 pW/Hz05 NEP by simulation. The fabricated chip area is 4×4 mm2 including wire-bonding pads. Employing the fabricated 7×7 detector array as a detector, real-time reflection imaging at 300 GHz was successfully carried out.