Reducing support loss in micromechanical ring resonators using phononic band-gap structures
Reducing support loss in micromechanical ring resonators using phononic band-gap structures
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DOI：
10.1088/0022-3727/44/37/375101
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发表时间：
2011-09
期刊：
影响因子：
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通讯作者：
Feng-Chia Hsu;J. Hsu;Tsun-Che Huang;Chin-Hung Wang;P. Chang
中科院分区：
文献类型：
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作者：
Feng-Chia Hsu;J. Hsu;Tsun-Che Huang;Chin-Hung Wang;P. Chang
在微机械谐振器中，通过支撑进入衬底的能量损失可能导致低品质因子。为了消除支撑损耗，本文采用了声子带隙结构。我们展示了声子晶体（PC）条的设计，用于支持扩展酒杯模式环谐振器，以提高品质因数。引入PC带，通过带隙和窄带效应阻止弹性波的传播。分析了环形谐振器的谐振特性和PC带的色散关系、本征模和传输特性。有限元仿真结果表明，当谐振器工作频率在带隙或聋带范围内时，谐振器的泄漏功率得到有效降低，谐振器内部的储能得到增强。期望实现具有最小支撑损耗的高品质因数微机械环形谐振器。
In micromechanical resonators, energy loss via supports into the substrates may lead to a low quality factor. To eliminate the support loss, in this paper a phononic band-gap structure is employed. We demonstrate a design of phononic-crystal (PC) strips used to support extensional wine-glass mode ring resonators to increase the quality factor. The PC strips are introduced to stop elastic-wave propagation by the band-gap and deaf-band effects. Analyses of resonant characteristics of the ring resonators and the dispersion relations, eigenmodes, and transmission properties of the PC strips are presented. With the proposed resonator architecture, the finite-element simulations show that the leaky power is effectively reduced and the stored energy inside the resonators is enhanced simultaneously as the operating frequencies of the resonators are within the band gap or deaf bands. Realization of a high quality factor micromechanical ring resonator with minimized support loss is expected.