Fabrication of silicon nanospheres placeable on a desired position for dielectric metamaterials in the visible region
Fabrication of silicon nanospheres placeable on a desired position for dielectric metamaterials in the visible region
复制标题
DOI：
10.1364/ome.415313
复制
发表时间：
2020-12
影响因子：
2.8
通讯作者：
Taiyu Okatani;Y. Abe;Takuya Nakazawa;K. Hane;Y. Kanamori
中科院分区：
文献类型：
--
作者：
Taiyu Okatani;Y. Abe;Takuya Nakazawa;K. Hane;Y. Kanamori
提出了一种利用电子束光刻和氢退火技术在任意位置制备直径为100-200 nm的硅纳米球的方法。纳米球在可见光区域显示出强磁场响应，观察到纳米球发射的散射光。用时域有限差分法计算了散射谱。按照设计成功制备了周期性排列的硅纳米球，并通过暗场照明显微镜测量了散射光。散射光谱在可见光范围内，峰位随粒径增大而红移。
We proposed a fabrication method for silicon nanospheres with diameters of 100-200 nm at arbitrary locations by using electron-beam lithography and hydrogen annealing. The nanospheres showed a strong magnetic field response in the visible region that was observed as scattered light emitted from the nanospheres. The scattering spectra were calculated by finite-difference time-domain simulation. Periodically arranged silicon nanospheres were successfully fabricated as designed, and the scattered light was measured by dark-field illumination microscopy. The scattering spectra were in the visible range, and the peak position was redshifted as the diameter increased.