Simple autofocusing method by image processing using transmission images for large-scale two-photon lithography
Simple autofocusing method by image processing using transmission images for large-scale two-photon lithography
复制标题
DOI：
10.1364/oe.390486
复制
发表时间：
2020-04-13
期刊：
影响因子：
3.8
通讯作者：
Maruo, Shoji
中科院分区：
文献类型：
--
作者：
Fujishiro, Yoko;Furukawa, Taichi;Maruo, Shoji
我们提出了一种简单的自动聚焦技术，它可以被引入到传统的双光子光刻系统中，而不需要额外的设备。自动聚焦是通过使用光聚合体素的传输图像进行图像处理来实现的。通过最优低通滤波检测传输图像中的体素，提高了传输图像的信噪比。从差值图像中检测出焦点的精度约为250 nm。此外，我们还用这种方法批量制造了面积为900×900微米(2)的5×5螺旋正方形阵列。该方法在构建低成本、紧凑、通用的双光子光刻设备方面具有潜在的应用价值。(C)OSA开放获取出版协议条款下的2020年美国光学学会
We propose a simple autofocusing technique that can be introduced into conventional two-photon lithography systems without additional devices. Autofocusing is achieved by image processing using transmission images of photopolymerized voxels. The signal-to-noise ratio of transmission images was improved by optimal low-pass filtering to detect voxels in them. The focal point was detected with an accuracy of about 250 nm from the difference images. Further, we demonstrated mass-fabrication of a 5 x 5 spiral square array with an area of 900 x 900 mu m(2) using this method. The method has potential application in constructing low-cost, compact and versatile two-photon lithography apparatus. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement